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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators.

Jian YangChaowei SiGuowei HanMeng ZhangLiuhong MaYongmei ZhaoJin Ning
Published in: Micromachines (2015)
Keyphrases
  • thin film
  • databases
  • website
  • real time
  • neural network
  • image sequences
  • similarity measure
  • decision support
  • application specific