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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators.
Jian Yang
Chaowei Si
Guowei Han
Meng Zhang
Liuhong Ma
Yongmei Zhao
Jin Ning
Published in:
Micromachines (2015)
Keyphrases
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thin film
databases
website
real time
neural network
image sequences
similarity measure
decision support
application specific