Emre Ilgünsatiroglu

Publication Activity (10 Years)

Years Active: 2012-2014
Publications (10 Years): 0

Top Topics

Spatial And Temporal Dimensions

Semiconductor Devices

Microscopy Images

Top Venues

Microelectron. Reliab.

Publications

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov, F. Filosomi, C. Santini
Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy. ESSDERC (2014)
Mauro Ciappa, Alexey Yu. Illarionov, Emre Ilgünsatiroglu
Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields. Microelectron. Reliab. 54 (9-10) (2014)
Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov
Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range. Microelectron. Reliab. 54 (9-10) (2014)
Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa
Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. Microelectron. Reliab. 53 (9-11) (2013)
Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov
Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectron. Reliab. 52 (9-10) (2012)