Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy.
Mauro CiappaEmre IlgünsatirogluAlexey Yu. IllarionovF. FilosomiC. SantiniPublished in: ESSDERC (2014)
Keyphrases
- monte carlo
- electron microscopy
- x ray
- low energy
- monte carlo methods
- image stacks
- monte carlo simulation
- markov chain
- importance sampling
- stochastic approximation
- monte carlo tree search
- thin film
- markovian decision
- adaptive sampling
- maximum likelihood
- particle filter
- surface roughness
- monte carlo method
- matrix inversion
- temporal difference
- game tree search
- parameter estimation
- machine learning
- optimal strategy
- expectation maximization
- data streams
- bayesian networks