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Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields.
Mauro Ciappa
Alexey Yu. Illarionov
Emre Ilgünsatiroglu
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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microscopy images
magnetic field
electron beam
semiconductor devices
electron microscopy
electromagnetic fields
microscopic images
image processing
x ray
cancer cells
phase contrast
image segmentation
computational complexity
multi channel
integrated circuit
cell division