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Electrical properties in low temperature range (5K-300K) of Tantalum Oxide dielectric MIM capacitors.

Emilie DeloffreL. MontèsGérard GhibaudoSylvie BruyèreSerge BlonkowskiStéphane BécuMickael Gros-JeanSébastien Crémer
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • electrical properties
  • wide range
  • real time
  • databases
  • range data
  • leakage current
  • silicon nitride
  • decision trees
  • multiresolution
  • film thickness