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Small-sized Mach-Zehnder interferometer optical switch using thin film Ge2Sb2Te5 phase-change material.
Takumi Moriyama
Hitoshi Kawashima
Masashi Kuwahara
Xiaomin Wang
Hideaki Asakura
Hiroyuki Tsuda
Published in:
OFC (2014)
Keyphrases
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thin film
small sized
white light interferometry
silicon nitride
short circuit
high density
multi layer
grain size
high speed
solar cell
electron microscopy
room temperature
chemical vapor deposition
packet switching
neural network
low power
query processing