ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems.
MuDer JengXiaolan XieSheng-Luen ChungPublished in: IEEE Trans. Syst. Man Cybern. Part A (2004)
Keyphrases
- manufacturing systems
- manufacturing processes
- petri net
- complex systems
- manufacturing environment
- quality control
- shop floor
- flexible manufacturing systems
- cooperative
- parallel processing
- physical processes
- holonic manufacturing systems
- information systems
- manufacturing process
- parallel implementation
- shared memory
- motion blur