Silicon interposer platform with low-loss through-silicon vias using air.

Hanju Oh Gary S. May Muhannad S. Bakir

Published in: 3DIC (2015)

Keyphrases

search engine
high density
low cost
real time
databases
high speed
high levels
artificial intelligence
integrated circuit
database
silicon dioxide
real world
knowledge base
data sets
e government
semiconductor devices
transmission electron microscopy