Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET.
Hiroaki ArimuraS. BrusJacopo FrancoY. OnikiA. VandoorenT. ConardB. T. ChanB. KannanM. SamieeW. LiP. DeminskyiE. SheroJ. BakkeN. JourdanG. Alessio VerniJ. W. MaesM. GivensLars-Åke RagnarssonJérôme MitardE. Dentoni LittaN. HoriguchiPublished in: VLSI Technology and Circuits (2023)