Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET.

Hiroaki Arimura S. Brus Jacopo Franco Y. Oniki A. Vandooren T. Conard B. T. Chan B. Kannan M. Samiee W. Li P. Deminskyi E. Shero J. Bakke N. Jourdan G. Alessio Verni J. W. Maes M. Givens Lars-Åke Ragnarsson Jérôme Mitard E. Dentoni Litta N. Horiguchi

Published in: VLSI Technology and Circuits (2023)

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