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Improved Stability of Large Area Excimer Laser Crstallised Polysilicon Thin Film Transistors under DC and AC Operating.

Hamid ToutahJean-François LlibreBoubekeur Tala-IghilTaieb Mohammed-BrahimYouri HelenG. GautierOlivier Bonnaud
Published in: Microelectron. Reliab. (2001)
Keyphrases
  • thin film
  • high density
  • random access memory
  • short circuit
  • solar cell
  • multi layer
  • plasma etching
  • low power
  • chemical vapor deposition