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1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas.
Hiroyuki Uchiyama
Hiroshi Sato
Kazunori Shinoda
Akira Taike
Takafumi Taniguchi
Shinji Tsuji
Published in:
IEICE Electron. Express (2004)
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