Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors.

Ji-Hoon Han Sung Joon Min Eun-Sang Lee Joon Hyub Kim Nam Ki Min

Published in: Sensors (2023)

Keyphrases

high speed
low cost
reliability assessment
high density
space charge
data sets
machine learning
finite element analysis
quasi static
silicon dioxide
gallium arsenide