Spot-Size Converter of Thin-film Lithium Niobate on Quartz Substrate.

Liangpeng Qin Wanli Yang Yuxiang Hao Yingbo Liu Haiou Li Yihui Yin

Published in: ICCT (2023)

Keyphrases

thin film
grain size
film thickness
high density
short circuit
electron microscopy
multi layer
neural network
room temperature
machine learning
genetic algorithm
control method
solar cell
power electronics
plasma etching
white light interferometry