X-ray lithography from 500 to 30 nm: X-ray nanolithography.

Henry I. Smith Mark L. Schattenburg

Published in: IBM J. Res. Dev. (1993)

Keyphrases

x ray
electron beam lithography
transmission electron microscopy
electron beam
metal oxide
intraoperative
x ray images
digital x ray images
medical imaging
projection images
low dose
three dimensional
ct scans
dual energy
tomographic images
optical imaging
pre operative
image analysis