High Performance Humidity Sensor by Using Silicon Nanowire Array.
Xun YangYuelin WangTie LiPublished in: NEMS (2018)
Keyphrases
- charge coupled device
- high speed
- sensor networks
- image sensor
- focal plane
- sensor data
- digital camera
- sensor array
- data acquisition
- low cost
- energy consumption
- ccd camera
- high density
- real time
- monitoring system
- multi sensor
- dynamic range
- photon counting
- cmos technology
- liquid crystal
- plasma etching
- transmission electron microscopy
- antenna array
- high reliability
- sensor fusion
- imaging systems