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Fabrication of 2D-extruded fractal structures using repeated corner lithography and etching.
Erwin Berenschot
Hadi Yagubizade
Henri V. Jansen
Marcel Dijkstra
Niels R. Tas
Published in:
NEMS (2014)
Keyphrases
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integrated circuit
electron beam
magnetic recording
high density
plasma etching
thin film
image compression
x ray
fractal dimension
electron beam lithography
database
information retrieval
information systems
image segmentation
multiresolution
complex structures