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Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization.
R. Midahuen
Bernard Previtali
C. Fontelaye
G. Nonglaton
Sylvain Barraud
V. Stambouli
Published in:
ESSCIRC (2021)
Keyphrases
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integrated circuit
dna computing
electrical properties
high density
false positives
automatic detection
detection algorithm
event detection
detection rate
real time
object detection
dna sequences
detection accuracy
sensor networks
detection method
anomaly detection
printed circuit boards
electron beam