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Electrical characteristics and reliability properties of metal-oxide-semiconductor capacitors with HfZrLaO gate dielectrics.

C. H. LiuH. W. Chen
Published in: Microelectron. Reliab. (2010)
Keyphrases
  • electrical properties
  • gate dielectrics
  • short circuit
  • integrated circuit
  • physical characteristics
  • three dimensional
  • signal processing
  • metal oxide semiconductor