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MFSFET with 5 nm Thick Ferroelectric Undoped HfO2 Gate Insulator.

J. W. ShinM. TanumaS. Ohmi
Published in: DRC (2021)
Keyphrases
  • leakage current
  • low voltage
  • gate insulator
  • electrical properties
  • power line
  • silicon dioxide
  • computer vision
  • image sequences
  • multi view