Fault Detection for the class Imbalance Problem in semiconductor manufacturing Processes.
Jian WangJian FengZhiyan HanPublished in: J. Circuits Syst. Comput. (2014)
Keyphrases
- fault detection
- manufacturing processes
- class imbalance
- active learning
- class distribution
- fault diagnosis
- manufacturing systems
- industrial processes
- product quality
- cost sensitive
- high dimensionality
- condition monitoring
- minority class
- mathematical models
- power plant
- rapid prototyping
- feature selection
- concept drift
- process control
- test data
- real time