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Adaptive fault detection framework for recipe transition in semiconductor manufacturing.
Jaewoong Shim
Sungzoon Cho
Euiseok Kum
Suho Jeong
Published in:
Comput. Ind. Eng. (2021)
Keyphrases
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fault detection
semiconductor manufacturing
fault diagnosis
industrial processes
rotating machinery
management system
real time
neural network
genetic programming
power plant
condition monitoring