Fast image drift compensation in scanning electron microscope using image registration.
Naresh MarturiSounkalo DembéléNadine PiatPublished in: CASE (2013)
Keyphrases
- scanning electron microscope
- image registration
- image matching
- single image
- image content
- multiscale
- image alignment
- image segmentation
- image data
- image representation
- template matching
- image classification
- image analysis
- input image
- registration accuracy
- image features
- image pixels
- edge detection
- image retrieval
- mutual information
- test images
- region of interest
- feature matching
- low level
- vector field
- high resolution
- image set
- affine transformation
- coarse to fine
- image pairs
- image collections
- image regions
- multi modality
- groupwise registration