Hybrid lithography optimization with E-Beam and immersion processes for 16nm 1D gridded design.
Yuelin DuHongbo ZhangMartin D. F. WongKai-Yuan ChaoPublished in: ASP-DAC (2012)
Keyphrases
- computer aided
- global optimization
- case study
- electron beam
- optimal design
- optimization problems
- virtual environment
- building blocks
- optimization algorithm
- electron beam lithography
- neural network
- structural design
- support systems
- hybrid learning
- design patterns
- control system
- user interface
- database systems
- three dimensional
- genetic algorithm