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Experimental extraction of degradation parameters after constant voltage stress and substrate hot electron injection on ultrathin oxides.
C. Trapes
Didier Goguenheim
Alain Bravaix
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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electrical properties
sensitivity analysis
parameter space
operating conditions
input parameters
electric field
film thickness
data sets
image segmentation
evolutionary algorithm
information extraction
parameter estimation
steady state
parameter values
automatic extraction
room temperature