Synchronized production planning and scheduling in semiconductor fabrication.
Sun Hoon KimYoung Hoon LeePublished in: Comput. Ind. Eng. (2016)
Keyphrases
- production planning and scheduling
- plasma etching
- semiconductor devices
- complex real world problems
- beam search
- scheduling problem
- thin film
- software platform
- high density
- integrated circuit
- electron beam lithography
- electron beam
- industrial applications
- production planning
- real time
- shop floor
- control system
- production scheduling
- field effect transistors
- control strategy
- np hard