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Ru-Based Thin Film Temperature Sensor for Space Environments: Microfabrication and Characterization under Total Ionizing Dose.
Sergio Iván Ravelo Arias
Diego Ramírez Muñoz
Susana Cardoso
Paulo P. Freitas
Published in:
J. Sensors (2016)
Keyphrases
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thin film
room temperature
chemical vapor deposition
film thickness
high density
databases
neural network
physical space
grain size
solar cell
sensor networks
time of flight
electron microscopy
white light interferometry