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High-NA EUV Optics - The key for miniaturization of integrated circuits in the next decade.
Heiko Feldmann
Paul Gräupner
Peter Kürz
Winfried Kaiser
Published in:
ESSDERC (2019)
Keyphrases
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integrated circuit
wide range
electron beam
information systems
high precision
database
neural network
data mining
machine learning
low cost
vision system
text categorization
machine vision
printed circuit boards