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Paul Gräupner
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Data Mining
Integrated Circuit
Text Categorization
Machine Vision
Top Venues
ESSDERC
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Publications
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Heiko Feldmann
,
Paul Gräupner
,
Peter Kürz
,
Winfried Kaiser
High-NA EUV Optics - The key for miniaturization of integrated circuits in the next decade.
ESSDERC
(2019)