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Winfried Kaiser
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 2
Top Topics
Integrated Circuit
Expert Systems
Machine Vision
Success Or Failure
Top Venues
VLSI-DAT
ESSDERC
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Publications
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Winfried Kaiser
EUVL Optics: Status and Future Perspectives.
VLSI-DAT
(2019)
Heiko Feldmann
,
Paul Gräupner
,
Peter Kürz
,
Winfried Kaiser
High-NA EUV Optics - The key for miniaturization of integrated circuits in the next decade.
ESSDERC
(2019)