Scanning Laser Lithography With Constrained Quadratic Exposure Optimization.
Andrew J. FlemingOmid T. GhalehbeygiBen S. RoutleyAdrian G. WillsPublished in: IEEE Trans. Control. Syst. Technol. (2019)
Keyphrases
- concave convex procedure
- electron beam lithography
- optimization algorithm
- objective function
- global optimization
- pairwise
- optimization process
- structured light
- image processing
- scan data
- discrete optimization
- evolution strategy
- saddle point
- range sensors
- optimization strategies
- laser scanner
- lagrange multipliers
- optimization methods
- three dimensional