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Characterisation of Zinc Oxide Thin-Film Solidly Mounted Resonators for Particle Sensing in Air.
Jan Peter Specht
Siavash Esfahani
Yuxin Xing
Marina Cole
Julian W. Gardner
Published in:
I2MTC (2020)
Keyphrases
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thin film
white light interferometry
silicon nitride
room temperature
electron microscopy
high density
short circuit
vision system
grain size
multi layer
sensor networks
video camera
solar cell
fuel cell
database
low cost
plasma etching
expert systems