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On Step-and-Scan Trajectories used in Wafer Scanners in Semiconductor Manufacturing.
Yazan Mohammad Al-Rawashdeh
Mohammad Al Janaideh
Marcel Heertjes
Published in:
IROS (2021)
Keyphrases
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semiconductor manufacturing
process control
discrete event simulation
production system
post processing
information retrieval
scan data
image data
range images
range data
motion patterns