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DTCO for DSA-MP Hybrid Lithography with Double-BCP Materials in Sub-7nm Node.
Jiaojiao Ou
Xiaoqing Xu
Brian Cline
Greg Yeric
David Z. Pan
Published in:
ICCD (2017)
Keyphrases
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tree structure
electron beam
learning materials
hybrid approaches
decision trees
search space
logic programs
graph structure
hybrid learning
electron beam lithography