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Local Back-Gate Monolayer MoS2 Transistors with Channel Lengths Down to 50 nm and EOT ∼ 1 nm Showing Improved $I_{\text{on}}$ using Post-Metal Anneal.
Marc Jaikissoon
Jung-Soo Ko
Eric Pop
Krishna C. Saraswat
Published in:
DRC (2023)
Keyphrases
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