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Thin-Film-Shaped Flexible Actuators.
Wenbo Pang
Shiwei Xu
Liya Liu
Renheng Bo
Yihui Zhang
Published in:
Adv. Intell. Syst. (2023)
Keyphrases
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thin film
high density
solar cell
short circuit
plasma etching
grain size
degrees of freedom
room temperature
multi layer
electron microscopy
control system
mathematical model