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Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates.
Tianning Liu
Ajay Dangi
Jeong Nyeon Kim
Sri-Rajasekhar Kothapalli
Kyusun Choi
Susan Trolier-McKinstry
Thomas N. Jackson
Published in:
Sensors (2021)
Keyphrases
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thin film
electron microscopy
high density
low energy
multi layer
short circuit
plasma etching
grain size
white light interferometry
solar cell
room temperature
neural network
transmission line
film thickness
database
finite automata
software engineering