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Impact of integrating equipment health in production scheduling for semiconductor fabrication.
Yu-Ting Kao
Stéphane Dauzère-Pérès
Jakey Blue
Shi-Chung Chang
Published in:
Comput. Ind. Eng. (2018)
Keyphrases
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production scheduling
job shop scheduling problem
single machine
plasma etching
manufacturing systems
semiconductor devices
process planning
image analysis
high density
vehicle routing
genetic algorithm
image processing
search space
benchmark problems