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Fabrication of low-loss thin film microstrip line on low-resistivity silicon for RF applications.

Hung-Wei WuYan-Kuin SuRu-Yuan YangMin-Hang WengYu-Der Lin
Published in: Microelectron. J. (2007)
Keyphrases
  • high density
  • thin film
  • plasma etching
  • multiresolution
  • small size
  • electron microscopy
  • microstrip
  • grain size
  • control system
  • power system