Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation.

Carlos Angulo Barrios Víctor Canalejas-Tejero

Published in: Micromachines (2016)

Keyphrases

electron beam
x ray
integrated circuit
three dimensional
design parameters
free form
surface reconstruction
semiconductor devices
single image
range data
curved surfaces
electron beam lithography