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A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication.

Hongwei XuWei QinJinhua HuYan-Ning SunYoulong LvJie Zhang
Published in: Adv. Eng. Informatics (2024)
Keyphrases
  • fault detection
  • fault diagnosis
  • wafer fabrication
  • neural network
  • industrial processes
  • real time
  • decision making
  • special case
  • condition monitoring