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A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings.
Jian Cui
Qiancheng Zhao
Published in:
IEEE Trans. Ind. Electron. (2022)
Keyphrases
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circular points
long period
low cost
optical axis
high density
three dimensional
fiber optic
epipolar lines
angular velocity
ground plane
primal dual
cross section
high speed
fronto parallel
transmission electron microscopy
gallium arsenide
edge detection
field effect transistors