Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications.
Shinji MatsuiReo KometaniPublished in: IEICE Trans. Electron. (2007)
Keyphrases
- chemical vapor deposition
- three dimensional
- high density
- thin film
- electron beam
- x ray
- electron beam lithography
- shape from focus
- d objects
- cross section
- virtual reality
- reinforced concrete
- data center
- computer vision
- integrated circuit
- surface reconstruction
- real time
- human body
- computer simulation
- multi view
- artificial intelligence
- data sets