Modification of the Electron Entropy Production in a Plasma.
Juan F. García-CamachoGonzalo Ares de PargaKaren Arango-ReyesEncarnación Salinas-HernándezSamuel Domínguez-HernándezPublished in: Entropy (2020)
Keyphrases
- high energy
- electric field
- production system
- mutual information
- information theoretic
- production scheduling
- production process
- production planning
- real world
- high density
- quality control
- information theory
- thin film
- three dimensional
- case study
- electron microscopy
- electron beam
- learning algorithm
- semiconductor manufacturing
- data sets
- electron microscope