Vertical deposition of nanospheres on the open sidewalls of silicon pillars.

Y. F. Wang Y. Tian K. J. Feng C. Li D. D. She W. G. Wu

Published in: NEMS (2012)

Keyphrases

plasma etching
chemical vapor deposition
thin film
high density
low cost
high speed
neural network
video sequences
open systems
databases
multiscale
electrical properties