Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique.
Liujiang YuB. K. TayD. SheejaY. Q. FuJianmin MiaoPublished in: Int. J. Comput. Eng. Sci. (2003)
Keyphrases
- thin film
- electron microscopy
- high density
- plasma etching
- integrated circuit
- liquid crystal displays
- thin film transistor
- magnetic recording
- low density
- microscopy images
- high speed
- agent architecture
- reactive planning
- real world
- deep architectures
- deep learning
- multi layer
- data center
- computer vision
- database
- electron beam
- multi agent
- field effect transistors
- bayesian networks
- three dimensional
- decision trees
- electro mechanical systems