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A defect level monitor of resistive open defect at interconnects in 3D ICs by injected charge volume.
Kouhei Ohtani
Naho Osato
Masaki Hashizume
Hiroyuki Yotsuyanagi
Shyue-Kung Lu
Published in:
ISCIT (2017)
Keyphrases
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defect detection
real time
artificial intelligence
expert systems
higher level
monitoring system
database
data sets
real world
learning algorithm
bayesian networks
information technology