A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors.
Ryoichi IshiharaArie GlazerYoel RaabPeter RusianMannie DorfanBenzi LaviIlya LeizersonAlbert KishinevskyYvonne Van AndelXin CaoWim MetselaarKees BeenakkerSara StolyarovaYael NemirovskyPublished in: IEICE Trans. Electron. (2006)