Stretchable metal oxide thin film transistors on engineered substrate for electronic skin applications.

Alessia Romeo Stéphanie P. Lacour

Published in: EMBC (2015)

Keyphrases

thin film
metal oxide
high density
film thickness
x ray
high speed
solid state
short circuit
multi layer
solar cell
low power
power consumption
white light interferometry
data center
chemical vapor deposition
room temperature
plasma etching