Zapping thin film transistors.

N. Tosic Golo Fred G. Kuper Ton J. Mouthaan

Published in: Microelectron. Reliab. (2002)

Keyphrases

thin film
high density
low density
electron microscopy
power consumption
short circuit
integrated circuit
data center
grain size
circuit design
cmos technology
room temperature
film thickness
low power
plasma etching
multi layer
solar cell