/p-Si Capacitor via Hydrogen Passivation.

Dongjoo Bae Doowon Lee Sungho Kim Hee-Dong Kim

Published in: IEEE Access (2022)

Keyphrases

metal oxide
chemical vapor deposition
x ray
short circuit
thin film
solid state
high speed
si sio
steady state
transmission line
high density
database
feature selection
image processing
case study
air fuel ratio